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30 December 2013

Micro Electronic and Mechanical Systems

By : Unknown
On : 04:21
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Author : Kenichi Takahata

Publisher : InTech, December, 2009

ISBN-13 : 978-953-307-027-8

Number of pages : 386 

Description :
Recent advances in micro- and nanofabrication technologies have enabled the development of miniaturized accelerometers, gyroscopes, μTAS chips, etc. These microdevices are made of substrates having thicknesses relatively greater (~100μm) than the feature scale of the microfabricated components (1~10 μm, Fig.1a). Conversely, the microscale organelles or tissues of natural creatures are made of substrates, or membranes, that are relatively thin compared to their feature size. For example, a human blood capillary, which is 10~100 μm in diameter, has vessel walls with thicknesses of ~1 μm. To give another example, a cell with a diameter of ~10 μm is composed of lipid bilayer membranes with thicknesses of ~10 nm. This fundamental characteristic of the architecture of biological microstructures, which is totally different from that of artificial microdevices, makes life a highly adaptable system from both chemical and physical perspectives. The small thickness of the membrane enhances transport of heat and substances between the body and its surroundings, and it provides softness to the body, enabling passive and active morphological changes for adapting to the environment.

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Micro Electronic and Mechanical Systems